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本文研究砷注入硅后以高频感应石墨作辐射热源的快速热退火过程.实验结果表明,快速热退火过程可分为二个阶段:第一阶段为固相外延再生长.第二阶段为高温消除损伤.
In this paper, the rapid thermal annealing of high-frequency induction graphite as a radiant heat source after Si arsenic injection is studied.The experimental results show that the rapid thermal annealing process can be divided into two stages: the first stage is the re-growth of solid phase epitaxy, the second stage is the high- Eliminate damage.