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研究了垂直腔面发射激光器(VCSEL)的侧向氧化工艺及其特性.发现对于条形台面,氧化物生长遵循线性生长规律.但对于在VCSEL中采用的两种结构,氧化物的生长(温度高于435℃)表现为非线性生长行为.理论分析表明,台面结构的几何形状对高温下的氧化速率产生了影响.
The lateral oxidation process and its characteristics of a vertical cavity surface emitting laser (VCSEL) were investigated. It was found that the oxide growth follows a linear growth pattern for the stripe mesas, but for both structures used in the VCSEL, the oxide growth Higher than 435 ℃) showed a nonlinear growth behavior.The theoretical analysis shows that the geometry of the mesa structure has an effect on the oxidation rate at high temperature.