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研究采用了ＭＥＷＡ源等离子体浸没离子注入的方法。利用钛的等离子体的沉积与自身离子的注入．形成ＩＢＡＤ效应。在氮气气氛环境下，在ＡＩＳ１３０４不锈钢表面获得了氮化钛膜。ＡＦＳ结果表明，由于钛的高电荷态和重离子效应使得钛与基体获得了较厚的原子混合层。
The study used MEWA source plasma immersion ion implantation method. Deposition of titanium using plasma and implantation of self-ions. IBAD effect. Under a nitrogen atmosphere, a titanium nitride film was obtained on the AIS1304 stainless steel surface. The AFS results show that the titanium and the matrix obtain thicker mixed layers of atoms due to the high charge state and heavy ion effect of titanium.