微系统技术是芯片制造技术高度发展下的产物。由于硅的抗拉强度和弹性与钢类似,而且更轻,更耐高温、耐腐蚀,于是人们利用微电子技术中成熟的光刻技术,在标准硅片上刻制出微型机械(电机、齿轮、泵、阀门等)、微型(压力、加速度等)传感器、微型机械手、微型激光器等等,为人类未来的生活突然 Micro-system technology is the product of the highly developed chip manufacturing technology. Due to the similar tensile strength and elasticity of silicon as the steel, and lighter, more resistant to high temperature and corrosion, people use the mature lithography technology of microelectronics to engrave micro-machines (motors, gears , Pumps, valves, etc.), miniature (pressure, acceleration, etc.) sensors, micromanipulators, micro lasers, etc. for the future of human life suddenly