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对硼掺杂p型金刚石薄膜压阻效应的国内外研究现状进行了综述,并对p型金刚石薄膜具有非常显著的压阻效应的产生机制进行了初步分析讨论。
The research status of the piezoresistive effect of boron-doped p-type diamond films at home and abroad are reviewed. The mechanism of p-type diamond films with very significant piezoresistive effects is discussed and discussed.