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采用反应磁控溅射法制备了Al0.3CrFe1.5MnNi0.5高熵合金氮化物薄膜,分析了不同氮气含量反应下薄膜的微观结构,并考察了薄膜的摩擦磨损性能。结果表明:溅射时氮含量(RN)为0%时,薄膜为体心立方结构,RN为10%时,氮化物镀层主相为面心立方CrN,且存在其他原子置换CrN的晶格中部分Cr原子而形成固溶体。RN达到15%时,薄膜形成非晶结构,随着RN的增大,薄膜非晶化趋势明显。RN为20%~30%时,氮气的固溶度逐渐达到饱和。高熵合金氮化物薄膜的摩擦系数较合金薄膜有明显提高,在磨耗过程中,能够有效阻止裂纹,抗摩擦磨损性能较合金薄膜均有不同程度的提高。
The Al0.3CrFe1.5MnNi0.5 high-entropy alloy nitride films were prepared by reactive magnetron sputtering. The microstructure of the films was analyzed under different nitrogen contents. The friction and wear properties of the films were also investigated. The results show that the film is a cubic structure when the nitrogen content (RN) is 0% and the main phase of the nitride coating is face centered cubic (CrN) with RN of 10%. In the lattice with other atoms replacing CrN Part of the Cr atoms to form a solid solution. When the RN reached 15%, the film formed an amorphous structure. With the increase of RN, the tendency of the film amorphization was obvious. When the content of RN is 20% ~ 30%, the solid solubility of nitrogen is gradually saturated. The coefficient of friction of high-entropy alloy nitride film is obviously higher than that of alloy film, and it can effectively prevent cracks in the process of wear, and the anti-friction and wear properties are all improved to some extent compared with that of alloy film.