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TMA技术公司研制出一种非接触式表面污点探测器—SurfMap—IR。该探测器利用漫射红外反射自动探测和测绘小至0.03μm的表面缺
TMA Technologies has developed a non-contact surface stain detector -SurfMap-IR. The detector automatically detects and maps surface defects as small as 0.03 μm using diffuse infrared reflection