一、引言固体物质的性质不仅决定于它的化学组成和结构,在很大程度上还决定于它的显微和亚显微不均匀性。为此,必须在显微范围内研究固体物质的组成。金属物理及其它领域内的一系列工作都要求测定直径约为1微米范围内物质的组成。微区域X射线发射光谱分析可以用来解决这个问题。 I. Introduction The nature of a solid material depends not only on its chemical composition and structure, but also on its microscopic and sub-microscopic heterogeneity. For this reason, the composition of the solid material must be studied in the microscopic range. A series of tasks in the field of metal physics and other fields require the determination of the composition of matter within a diameter of about 1 micrometer. Micro-area X-ray emission spectroscopy can be used to solve this problem.