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激光的特点是有较完美的单色特性、频谱范围宽及功率集中。任何频率的激光器其频带都只有2nm左右,这样就使其有用功率特别高。现在已有办法(拉曼散射法)使准分子激光器(Excimer)的频谱可以填满整个紫外频谱。激光器相当一个高度的点光源,如果与高压水银灯相比,一瓦可见光氩激光器的亮度为200瓦水银灯在其整个频谱上亮度的百万倍。下面介绍激光束在微电子技术中的一些应用。准分子激光器的应用。这种激光器以其紫外波段的功率高而受到
Laser is characterized by a more perfect monochromatic characteristics, wide frequency range and power concentration. The laser of any frequency has its frequency band only about 2nm, so that its useful power is extremely high. There is a solution (Raman scattering method) that excimer spectrum can fill the entire UV spectrum. The laser is a fairly high point source of light and the one watt visible argon laser has a million times the brightness of a 200 watt mercury lamp over its entire spectrum if compared to a high pressure mercury lamp. The following describes some of the applications of laser beams in microelectronics. Excimer laser applications. Such lasers suffer from the high power of their UV bands