论文部分内容阅读
本文分析了用双频激光干涉仪对仪器（机床）进行位置精度检测时，干涉仪固定棱镜（参考棱镜）及活动棱镜的安装合理与否对测量结果的影响。
This paper analyzes the influence of the installation of the interferometer fixed prism (prism) and movable prism on the measurement results when the position accuracy of the instrument (machine tool) is detected by the dual-frequency laser interferometer.