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极紫外光源功率是影响光源使用的关键参数,研究放电等离子体EUV光源等离子体时间特性,优化放电结构和光源功率具有重要意义。理论上计算了不同内径毛细管内等离子体压缩过程和收集效率,实验上采用极紫外探测器测量了毛细管内径对Xe气极紫外光源13.5nm(2%带宽)辐射输出时间特性的影响,分析了毛细管内径对等离子状态的影响。结合该系统光学收集系统设计参数、不同内径毛细管收集效率和极紫外探测器信号强度,给出了不同内径毛细管中间焦点处13.5nm(2%带宽)光功率比。结果表明:气压7Pa、电流28kA时,毛细管内径7mm条件下,光源中间焦点处光功率最优化。
The power of EUV light source is the key parameter that affects the light source. It is of great importance to study the time characteristics of plasma of EUV light source, optimize the structure of discharge and the power of light source. In theory, the plasma compression process and the collection efficiency are calculated in different inner diameter capillaries. In the experiment, the effect of capillary inner diameter on the radiation output time characteristic of 13.5nm (2% bandwidth) of Xe electrode was measured by using extreme ultraviolet detector. Effect of inner diameter on plasma state. The optical power ratio of 13.5 nm (2% bandwidth) at the middle focal point of different inner diameter capillaries was given by combining the design parameters of the system, the collection efficiency of different inner diameter capillaries and the signal intensity of EUV detector. The results show that under the condition of air pressure 7Pa and electric current 28kA, the optical power at the center of the light source is optimized under the condition of 7mm capillary diameter.