长光栅镀膜机是目前国内唯一一台专用长光栅镀膜机。近年来,随着数控、数显技术的发展,长光栅得到了日益广泛的应用。国内外高精度长度计量仪器和自动化加工装备,其基准检测元件大多采用长光栅。长光栅的制造水平(包括精度、均匀性、直流电平漂移,线条质量等)在很大程度上决定了这些设备的质量和先进性。在制造长光栅的复杂工艺过程度中,镀膜机及镀膜工艺是其主要关键之一。过去国内镀制长光栅尺都是在普通真空镀 Long grating coating machine is currently the only one special long grating coating machine. In recent years, with the development of numerical control and digital display technology, the long grating has been widely used. Domestic and foreign high-precision length measuring instruments and automated processing equipment, the reference detection components are mostly long grating. The manufacturing level of long gratings (including accuracy, uniformity, DC level drift, line quality, etc.) largely determines the quality and sophistication of these devices. Among the complex processes used to fabricate long gratings, coater and coating processes are one of the key issues. In the past the domestic plating long grating ruler are ordinary vacuum plating