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1曝光设备当前,在半导体器件生产中,用于65nm制程的器件已进入量产,而用于45nm制程也已成熟,即将进入量产期。
1 exposure equipment Currently, in the production of semiconductor devices, devices for 65nm process has entered mass production, and for the 45nm process has matured, is about to enter the mass production.