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本文着重介绍为提高激光全息干涉仪的检测精度而在仪器结构和测量方法上采取的措施。JQ-200型激光全息干涉仪采用低压充气的气垫作减震器,全机总重仅100多公斤,体积仅1米~3,并具有优良的防震性能和良好的稳定性与重复性。对均匀性好的玻璃的合干涉图利用m_t对m_r的周期调制来判读两组条纹的交叠级序,提高了测量精度。并提出了交错合干涉图的测量方法,用读数显微镜更客观更精确地判读两种条纹的交叠级序,从而使对Δn的检测精度达到5×10~7。
This article focuses on the measures taken to improve the structure and measurement methods of laser holographic interferometers. JQ-200 laser holographic interferometer uses low-pressure inflatable air cushion as shock absorber, the total weight of only 100 kilograms, the volume of only 1 m ~ 3, and has excellent shock resistance and good stability and repeatability. The coherence diagram of glass with good uniformity makes use of the periodic modulation of m_t to interpret the overlapping order of the two stripes and improve the measurement accuracy. The method of measuring the interlaced interferogram is proposed. The overlapping order of the two kinds of stripes can be more objectively and accurately read by a reading microscope, so that the detection precision of Δn can reach 5 × 10 ~ 7.