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利用直流磁控溅射方法,在石英基底上制备了可用于太赫兹电磁波频率范围内的宽带抗反射涂层的掺铝氧化锌导电薄膜。在太赫兹时域光谱频率0.1~1.0THz范围内研究不同厚度的氧化锌薄膜的介电响应,得到了与频率相关的电导率、吸收和薄膜折射率,着重研究了膜厚对太赫兹波传输特性的调制作用。实验结果很好地符合了经典的Drude模型,表明可以通过控制氧化锌薄膜的厚度来改变太赫兹波的传输特性,并且导电氧化锌薄膜能够作为太赫兹频段范围的宽带抗反射涂层应用于衬底和光学器件上。
An Al-doped zinc oxide conductive film was prepared on a quartz substrate using a DC magnetron sputtering method which can be used for a wideband anti-reflective coating in the frequency range of terahertz electromagnetic waves. The dielectric response of zinc oxide films with different thicknesses was studied in the terahertz time-domain spectral frequency range of 0.1-1.0 THz, and the conductivity, absorption and refractive index of the films were obtained. The effects of film thickness on terahertz wave transmission Modulation of the characteristics. The experimental results are in good agreement with the classical Drude model, indicating that the transmission characteristics of terahertz waves can be changed by controlling the thickness of the zinc oxide film and the conductive zinc oxide thin film can be applied as a broadband antireflection coating in the terahertz band range Bottom and optics.