本文提出了一种新型的多晶硅梁微静电开关结构,并在考虑硅梁固定边张力的情况下对多晶硅梁的受力弯曲、静电吸合等情形进行了有效的静力学理论分析。 利用微静电开关的充电吸合、放电弹开这一电、机过程,本文还实现了一种成本极低的微硅梁静电驱动振荡器。初步研究结果表明,硅梁的振动频宽大约为2.1kHz,振动幅度较小,振动平衡点在下电极附近。 In this paper, a new kind of micro-electrostatic switch structure of polycrystalline silicon beam is proposed, and an effective statics analysis is made on the bending force and electrostatic attraction of the polycrystalline silicon beam considering the fixed tension of the silicon beam. The use of micro-electrostatic charge switch charging, discharge bounce this electricity, the machine process, the paper also achieved a very low cost micro-silicon beam electrostatic drive oscillator. Preliminary results show that the vibration bandwidth of silicon beam is about 2.1kHz, the vibration amplitude is small, and the vibration equilibrium point is near the lower electrode.