Resonant-cavity technique was introduced to measure the permittivity and loss tangent of low-loss dielectrics. The dielectric properties at 9-10 GHz are measured accurately at the temperature up to 800 ℃by the resonant cavity technique. The only electrical parameters that need to be measured are quality factors (Q) and resonant length (L) of resonant cavity loaded and unloaded with dielectric sample. Moreover, the error caused by thermal expansion effect was resolved by error analysis and experimental calibration.