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在总结传统微悬臂梁表面应力生物传感方法缺陷的基础上,提出了基于PDMS(polydimethylsiloxane,聚二甲基硅氧烷)微薄膜的电容式表面应力生物传感器,分析了其基本结构原理及优点,并运用ANSYS软件建立了传感器仿真模型,对相同表面应力下,Au电极大小不同的薄膜形变进行了仿真,计算输出电容。结果表明,薄膜形变量及电容改变量与Au电极在PDMS薄膜上的覆盖率有关,通过比较输出电容改变量与薄膜形变之间的关系,得出了传感器最优结构尺寸。
On the basis of summarizing the defect of traditional biosensors on microcantilever surface, a capacitive surface stress biosensor based on PDMS (polydimethylsiloxane) microporous membrane was proposed, and its basic structural principle and advantages were analyzed. The sensor simulation model was established by using ANSYS software. The film deformation under the same surface stress and Au electrode size was simulated and the output capacitance was calculated. The results show that the amount of film deformation and capacitance change are related to the coverage of Au electrode on PDMS film. By comparing the relationship between the amount of change of output capacitance and the film deformation, the optimal structure size of the sensor is obtained.