论述采用激光干涉原理自动调焦的方法。被调焦的光学系统视为双光束干涉光路的一部分,从干涉条纹中取得光学系统的调焦信息,通过由CCD光电器件、微机、步进电机组成的光电系统对离焦量进行检测和补偿实现自动调焦。这种方法与已有的相关法和对比度法相比,调焦精度高,易于实现,有较高的实用性。 Discusses the automatic focusing method using laser interference principle. The focusing optical system is regarded as a part of the double-beam interference optical path, the focusing information of the optical system is obtained from the interference fringes, and the defocus amount is detected and compensated by a photoelectric system composed of a CCD photoelectric device, a microcomputer and a stepping motor To achieve automatic focus. Compared with the existing correlation method and contrast method, this method has high focusing accuracy, easy implementation and high practicability.