硅是一种良好的近红外材料。硅光栅的发展迄今已有20多年历史,在制作方法和应用上都有了较大的发展。硅光栅的微加工工艺可以分为体硅工艺和面硅工艺,这些微加工方法在技术上与微电子及微机械工艺可以兼容。本文介绍了硅光栅的制作及其在不同领域的应用。 Silicon is a good near-infrared material. The development of silicon grating so far has more than 20 years of history, in the production methods and applications have made great development. Silicon grating micro-machining process can be divided into bulk silicon process and surface silicon process, these micro-machining methods and technology in microelectronics and micromachining technology can be compatible. This article describes the production of silicon grating and its application in different fields.