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本文讨论一种简易式微波腔体微扰法测量介质薄膜厚度的工作原理。传感器应用园柱形高Q值的H_(011)腔体,使测厚仪具有高精度,且可实现无接触测量,特别适于可塑性介质薄膜厚度的测量。文中还分析测量误差及实验结果。测厚仪测量厚度为<100um,精度<±1um。
This article discusses a simple microwave cavity perturbation method to measure the working principle of dielectric film thickness. The sensor uses H_ (011) cavity with high cylindrical shape and high Q value to make the thickness gauge with high precision and contactless measurement, especially suitable for the measurement of the thickness of the plastic film. The article also analyzes the measurement error and experimental results. Thickness measurement thickness of <100um, accuracy <± 1um.