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炉温自动控制仪是半导体器件等工艺线上的一种重要设备。为提高产品质量、生产效率和降低工人劳动强度,对工艺线上的氧化、扩散和合金等高温炉普及炉温自动控制,是许多半导体器件厂迫切希望解决的一个问题。为响应华主席为首的党中央抓纲治国、大干快上、实现四个现代化的伟大号召,为有利于半导体器件厂自力更生多快好省地改造现有设备。我们试制了一种新型的、结构简单、性能良好、易于制造、造价很低的集成化炉温自动控制仪。
Automatic temperature control device is a semiconductor device technology line an important device. In order to improve product quality, production efficiency and reduce the labor intensity of workers, oxidation, diffusion and alloy automatic high-temperature furnace furnace temperature control, many semiconductor device manufacturers are eager to solve a problem. In response to Chairman Hua's leadership, the Central Party Central Committee has grasped the guiding principle of governing the country, making great efforts to realize the great call of the four modernizations, and renovating the existing equipment so as to facilitate the self-reliance of the semiconductor device factory to make it faster and better. We have tried out a new type of integrated automatic temperature controller with simple structure, good performance, easy manufacture and low cost.