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给出阶梯轴弯曲固有振动精确的分析方法。该法亦可用于工程中阶梯梁弯曲固有振动分析。我们用该方法计算了硅压阻式加速度传感器五阶梯硅梁固频和振型
The precise analysis method of the natural vibration of the stepped shaft is given. The method can also be used for the natural vibration analysis of the ladder beam in engineering. We used this method to calculate the frequency and mode shape of the five-step silicon beam for a silicon piezoresistive accelerometer