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利用金属蒸汽真空弧放电离子源对Ｈ１３钢样品进行Ｍｏ＋Ｃ双离子注入，离子引出电压为４０ｋＶ，Ｍｏ和Ｃ的注入剂量分别为６×１０１７ｉｏｎｓ／ｃｍ２和９×１０１７ｉｏｎｓ／ｃｍ２。利用阳极极化扫描方法测量样品在醋酸缓冲液中的耐腐蚀性能的实验结果表明，Ｍｏ＋Ｃ双离子注入可以改善样品的耐腐蚀能力，但退火处理使双注入样品的耐腐蚀能力变差。利用ＡＥＳ技术分析了高剂量双离子注入样品表面层的元素分布。腐蚀前后样品表面形貌的变化用ＳＥＭ技术进行了观测，对单Ｍｏ离子和单Ｃ离子注入样品的耐腐蚀性能也进行了研究。
The Mo + C double ion implantation was performed on the sample of H13 steel with a metal vapor vacuum arc discharge ion source with an ion extraction voltage of 40 kV and an implantation dose of 6 × 10 17 ions / cm 2 and 9 × 10 17 ions / cm 2, respectively. The experimental results of the anodic polarization scanning method to measure the corrosion resistance of the sample in acetate buffer solution show that Mo + C double ion implantation can improve the corrosion resistance of the sample, but the annealing treatment makes the corrosion resistance of the double injection sample worse. The elemental distribution of the surface layer of high dose double ion implantation samples was analyzed by AES technique. The changes of surface morphology before and after etching were observed by SEM technique and the corrosion resistance of single Mo ion and single C ion implantation samples was also studied.