.前言通常的离子镀装置1),郎使体积大的镀膜试件,也要利用直径小的放电待离子体圆柱(等离子体生成区)外侧扩散的等离子体区,由于该扩散区的等离子体密度比等离子体圆柱内部小行多,所以要降低离子镀的效率,也就是延长镀膜时间和降低电效率。另外还要加大阴极的损耗。如果把放电? . Preface Ordinary ion plating apparatus 1), Lang also make large-volume coated test piece, but also to use a small diameter discharge plasma cylinder outside the plasma generating region (plasma generating region) diffusion outside the plasma due to the diffusion region Density than plasma small cylinder within the small, so to reduce the efficiency of ion plating, which is to extend the coating time and reduce the electrical efficiency. In addition to increase the cathode loss. If the discharge?