一、概述 油增压泵和油扩散泵均利用油蒸汽射流来达到抽气的目的。故统称为油蒸汽射流泵。油增压泵油锅没有分馏装置,工作液在20℃时的蒸汽压为1×10-5托,所以泵的极限真空一般为1×10-4～5 × 10-4托。油扩散泵油锅设有分馏装置,工作液在20℃时的蒸汽压为1× 10-7托以至更低, First, an overview of the oil booster pump and oil diffusion pump are used to achieve the purpose of the steam jet. It is collectively referred to as oil steam jet pump. Oil booster pump without fractionation unit, the working fluid at 20 ℃ vapor pressure of 1 × 10-5 Torr, so the pump ultimate vacuum is generally 1 × 10-4 ~ 5 × 10-4 Torr. The oil diffusion pump oil pan is equipped with a fractionating device. The working fluid has a vapor pressure of 1 × 10 -7 Torr or lower at 20 ° C.,