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采用直流磁控溅射法和后退火技术在蓝宝石基片上制备了Tl-2212超导薄膜,考察了Tl-2212薄膜的厚度对其形貌和超导特性的影响。实验结果表明,随着超导薄膜厚度增加,其表面形貌由致密平整的结构演化为片状晶体结构,临界转变温度Tc和临界电流密度Jc先增大后减小,微波表面电阻Rs先减小后增大。在退火的CeO2缓冲层上所制备的无裂纹薄膜的最大厚度达到600nm,并仍然具有良好的超导性能。
Tl-2212 superconducting thin films were prepared on sapphire substrates by direct current magnetron sputtering and post-annealing techniques. The effects of Tl-2212 thickness on their morphology and superconductivity were investigated. The experimental results show that with the increase of the thickness of the superconducting thin film, the surface morphology of the superconducting thin film evolves from a dense and flat structure to a sheet-like crystal structure, the critical transition temperature Tc and the critical current density Jc first increase and then decrease, and the microwave surface resistance Rs decreases first Small increase later. Crack-free films prepared on the annealed CeO2 buffer layer have a maximum thickness of 600 nm and still have good superconducting properties.