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尖晶石Mn-Co-Ni-O三元氧化物具有优良的负温度系数(NTC),是一种制作热敏红外探测器较为理想的材料。采用射频磁控溅射法在非晶Al2O3衬底上制备了Mn1.56Co0.96Ni0.48O4(MCNO)多晶薄膜。使用能量色散X射线谱(EDS)对薄膜中金属元素组分进行了测量,分析得出薄膜中金属元素组分与靶材中的组分偏离在5%以内。对经过750℃空气中退火后的薄膜结构、电学和光学性质也进行了研究。实验结果表明:退火后薄膜具有单一立方尖晶石结构,且薄膜表面致密、均匀性好;薄膜的传导机制遵循小极子跃迁传导,在240~330K范围内符合VRH模型,其激活能和电阻温度系数(TCR)在室温下(300K)分别为0.297eV和-3.83%K-1;薄膜在紫外-可见波段具有较高的吸收率,间接带宽为0.61eV。
Spinel Mn-Co-Ni-O ternary oxide has an excellent negative temperature coefficient (NTC), which is an ideal material for making thermal infrared detectors. The Mn1.56Co0.96Ni0.48O4 (MCNO) polycrystalline thin films were prepared on amorphous Al2O3 by RF magnetron sputtering. The energy dispersive X-ray spectroscopy (EDS) was used to measure the metal elements in the films. The results showed that the metal elements in the films deviate from the target components by less than 5%. The electrical and optical properties of the films after annealing at 750 ° C in air were also investigated. The experimental results show that the film has a single cubic spinel structure after annealing, and the surface of the film is dense and has good uniformity. The conduction mechanism of the film follows the transition of the small polaron and meets the VRH model in the range of 240K to 330K. The activation energy and the resistance The temperature coefficient (TCR) was 0.297eV and -3.83% K-1 respectively at room temperature (300K). The film showed high absorption in the UV-visible band with an indirect bandwidth of 0.61eV.