本文着重介绍了一种新式高分辨率激光轮廓仪的原理、结构。此仪器测量表面微观形貌时，在高度方向的分辨率按国际惯用的均方值表示已优于１，并且在测量结果的形状误差方面明显优于国外研究成果。使它达到如此高分辨率的关键在于从光学结构上保证了优良的抗振动干扰性能，即使试件受外界振动干扰幅度达７０纳米时，仍能正常进行亚纳米级分辨率的测量。 This article focuses on the principle and structure of a new high-resolution laser profiler. When measuring the surface micromorphology of the instrument, the resolution in the height direction is better than 1 according to the internationally accepted mean square value, and the shape error of the measurement result is obviously superior to the foreign research results. The key to achieving such a high resolution is to ensure excellent anti-vibration interference performance from the optical structure, enabling sub-nanometer resolution to be measured normally even when the specimen is disturbed by external vibration by as much as 70 nm.