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本文用吸收电流信号作为附加的操作模式,用二次曝光技术对均匀的电惰性材科(electrically inert materials)的二次电子象中不易得到的形貌细节补偿,获得了清晰的图象。对表面比较平滑的多相合金,用吸收电子象定性地观察了其表面的成分分布。还观察了半导体材料中势垒电子伏特效应对吸收电子象的影响。实验结果表明,吸收电子象有十分广泛的应用。
In this paper, the absorption current signal is used as an additional mode of operation, and the double exposure technique is used to compensate for the difficult-to-obtain topography details in the uniform secondary electron images of the electrically inert materials, resulting in a clear image. For the relatively smooth surface of the multi-phase alloy, electron absorption as the qualitative observation of the distribution of the surface composition. The effect of the barrier electron-voltage effect in the semiconductor material on the absorption of electron images was also observed. The experimental results show that the absorption of electronic images has a very wide range of applications.