论文部分内容阅读
科研工作中常用到各种平行度很高的光学件,例如研究激光频率用的法卜里——珀洛标准具必须具有二十分之一波长的平行度。因此,如何在加工过程中方便准确地测量光学件的微小楔角乃是光学工艺经常需要解决的一个问题。目前,在光学加工中激光平面干涉仪用得比较普遍,通常用等厚干涉法,即通过测量工件自身两个表面产生的等厚干涉条纹的宽度而求出光学零件平行度的方法。下表给出了λ=0.6328微米时在玻璃平板(n=1.5)和空气平板(n=1)中的楔角θ与条纹宽度B的对应数值。
Commonly used in scientific research to a variety of high-parallel optical components, such as the study of the frequency of the laser Fabry-Perot etalon must have a one-twentieth wavelength parallelism. Therefore, how to measure the small wedges of the optical components easily and accurately during the processing is a problem that the optical technology often needs to solve. At present, the laser plane interferometer is generally used in optical processing. Usually the method of equal thickness interference is used to obtain the parallelism of optical components by measuring the width of the equal-thickness interference fringes generated on the two surfaces of the workpiece. The following table shows the corresponding values for the wedge angle θ and the stripe width B for a glass plate (n = 1.5) and an air plate (n = 1) for λ = 0.6328 microns.