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为了兼顾测量带宽和灵敏度的要求 ,提出了一种三自由度水平轴硅微陀螺系统 ,此系统由 3个质量块组成 ,质量块 2与质量块 3组合后与质量块 1构成了一个二自由度驱动方向的谐振器 ,再利用该谐振器进行动力学放大 ,得到非谐振状态下的大驱动振幅 .陀螺驱动频率响应曲线有两个谐振尖峰 ,在两峰值之间存在一个较平坦的区域 .当陀螺驱动工作在频率响应曲线的平坦区域时 ,机械增益虽然比工作在谐振尖峰处小 ,但机械增益受频率变化的影响减小 ,驱动频率的工作带宽增加 ,使得对驱动的控制要求相对宽松 .文中给出了动力学放大原理及所设计的陀螺结构的理论计算和仿真值 .
In order to meet the requirements of measurement bandwidth and sensitivity, a three-DOF horizontal-axis silicon micro-gyroscope system is proposed. The system consists of three mass blocks. The combination of mass block 2 and mass block 3 forms a two-freedom Degree of driving direction of the resonator, and then use the resonator for dynamic amplification, get non-resonant state of the large drive amplitude gyroscope frequency response curve has two resonant spikes, there is a relatively flat between the two peaks. When the gyro drive operates in the flat region of the frequency response curve, the mechanical gain is smaller than that of the resonant peak. However, the mechanical gain is affected by the change of frequency and the working bandwidth of the driving frequency is increased, which makes the control of the drive relatively loose In this paper, the principle of dynamic amplification and theoretical calculation and simulation of the gyro structure are given.