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为满足红外探测器在1.064μm和3～5μm双波段透射,在1.2～2.8μm波段反射,可适应复杂的环境条件、具有高稳定性和可靠性等要求,依据薄膜的设计理论,选择合理的膜系设计方法,借助TFC膜系设计软件对膜系结构进行优化设计。并采用电子束真空蒸发和离子辅助沉积技术,在蓝宝石晶体基底上镀制红外多波段滤光膜。同时对所使用的薄膜材料的光学、物理、化学和机械特性进行分析与研究。通过反复试验,优化工艺参数,使多波段滤光膜得以实现。对所制得的薄膜进行测试,基本满足红外探测器的使用要求。
In order to meet the requirements of infrared detectors in dual-band transmission of 1.064μm and 3 ~ 5μm and reflection in the band of 1.2 ~ 2.8μm, it can adapt to complex environmental conditions with high stability and reliability. According to the design theory of thin film, Membrane design method, with TFC membrane design software to optimize the membrane structure. And the use of electron beam vacuum evaporation and ion-assisted deposition technology, sapphire crystal substrate coated infrared multi-band filter. At the same time, the optical, physical, chemical and mechanical properties of the thin film materials used are analyzed and studied. Through repeated experiments, optimize the process parameters, so that multi-band filter can be achieved. The film was tested, basically meet the requirements of the infrared detector.