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有机金属化学气相沉积(MOCVD)方法在人工蛋白石空隙中填充了磷化铟(InP)晶体以改变这类材料的光学行为,在选择了InP的生长条件的基础上进行了周期生长试验。利用扫描电子显微镜(SEM)和紫外可见光谱(UV-Vis)对人工蛋白石晶体及其填充InP后的形貌和反射谱特性进行了分析。结果发现,采用周期生长方式有利于InP在模板空隙中的填充,且在反应时间相同的条件下,反应周期数越多,InP在空隙中的填充率越高,填充率增加反过来增大了二氧化硅球和空隙之间的折射率差,从而可控地对所制备光子晶体光子带隙进行调制。实验表明InP具有较好的生长质量,此项研究为制备三维InP光子晶体打下了基础。
The MOCVD method filled the artificial opal void with indium phosphide (InP) crystal to change the optical behavior of these materials. The growth of InP was studied based on the growth conditions. The morphologies and reflectivities of artificial opal crystals and their filled InP were analyzed by scanning electron microscopy (SEM) and ultraviolet-visible spectroscopy (UV-Vis). The results show that the periodic growth method is favorable for the filling of InP in the voids of the template. Under the same reaction time, the higher the number of reaction cycles, the higher the filling rate of InP in the voids, and the increase of the filling rate in turn increases The difference in refractive index between the silica sphere and the voids controls the modulation of the photonic bandgap band gap of the prepared photonic crystal. Experiments show that InP has good growth quality, and this study lays the foundation for the preparation of three-dimensional InP photonic crystals.