中国科学院自动化研究所与四机部4504厂共同研制的高精度双座标液压伺服工作台(见图1)经中国计量科学院检定,其性能指标如下:工作台运动距离:100×100毫米工作台运动直度:x轴 0.1微米/90毫米y轴 0.2微米/90毫米工作台运动偏摆:x轴水平面内2.7角秒垂直面内0.6角秒y轴水平面内0.8角秒垂直面内0.8角秒x、y轴的垂直度:1微米/85毫米工作台最大运动速度:15毫米/秒工作台最大加速度:>0.5米/秒~2重复定位精度:±0.2微米 Institute of Automation, Chinese Academy of Sciences and the Fourth Machine Factory 4504 jointly developed high-precision double-coordinate hydraulic servo table (see Figure 1) by the China Academy of Metrology test, the performance indicators are as follows: Table movement distance: 100 × 100 mm table Straightness: x-axis 0.1 μm / 90 mm y-axis 0.2 μm / 90 mm Workbench motion yaw: 2.7 Angstroms in the x-axis horizontal plane 0.6 Angstroms Second in the y-axis Horizontal plane 0.8 Angstroms Vertical plane 0.8 Angstroms seconds x, y-axis verticality: 1 micron / 85 mm table Maximum speed of movement: 15 mm / second Maximum acceleration of the table:> 0.5 m / s ~ 2 Repeatability: ± 0.2 microns