论文部分内容阅读
为了抑制空间高功率器件中微放电击穿,本文提出了一种表面多孔结构。通过在器件表面构造该多孔结构,实现对二次发射电子的禁锢,从而减小器件表面二次电子发射系数,提高微放电阈值。通过模拟分析不同金属材料表面的二次电子发射特性,结合波方程和电子动力学理论建立电磁粒子模拟算法,实现不同微观表面微波器件的数值模拟。使用偏置电流法测量不同条件下金属的二次电子发射数据。模拟计算一定功率电平下典型微波开关微放电的物理图像。测量给出不同银表面处理下的二次电子发射特性,并且模拟给出微放电阈值。模拟结果与实验结果吻合良好,证明了表面多孔结构对微放电的有效抑制。
In order to suppress the micro-discharge breakdown in high-power devices, a porous surface structure is proposed in this paper. By constructing the porous structure on the surface of the device, the confinement of the secondary emission electrons can be realized, thereby reducing the secondary electron emission coefficient on the surface of the device and improving the micro-discharge threshold. By simulating and analyzing the secondary electron emission characteristics of different metal surfaces, the electromagnetic particle simulation algorithm was established based on the wave equation and the electron dynamics theory to realize the numerical simulation of different microscopic surface microwave devices. The bias current method was used to measure the secondary electron emission data under different conditions. Simulation calculation of a certain power level typical microwave switch micro-discharge physical image. The secondary electron emission properties under different silver finishes were measured and the simulation gave the micro-discharge threshold. The simulation results are in good agreement with the experimental results, which proves that the porous structure on the surface effectively inhibits the micro-discharge.