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近日,中国建材总院石英院基于光刻用石英玻璃基板绿色制造技术,在衢州建立了国内首条从基板原材料制造到产品加工的成套生产线。该生产线可年产20000片4-6英寸石英玻璃基板,打破了石英玻璃基板原材料及产品长期依赖进口的局面。该生产线的建立,是中国建材总院承担的“十二五”国家科技支撑计划“高性能石英玻璃、微晶
Recently, based on the green manufacturing technology of lithography and quartz glass substrate, China National Building Material Institute Quartz Institute established the first complete set of production line in Quzhou, which is from the raw material of substrate to the processing of products. The production line can produce 20,000 pieces of 4-6-inch quartz glass substrates annually, breaking the long-term dependence on imported raw materials and products of quartz glass substrates. The establishment of this production line is undertaken by China Building Materials Institute ”Twelfth Five-Year “ National Science and Technology Support Program ”high-performance quartz glass, microcrystalline