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本文主要介绍应用辉光放电法制备的,光电性能优良的 a-S1_xC_1 x: H 薄膜的最佳工艺条件、红外吸收光谱、光学带隙E_(opt)同x的关系、ESCA和ESR的测量结果,井对这些实验结果进行了初步讨论.
In this paper, the best conditions of the a-S1_xC_1 x: H thin films prepared by the glow discharge method, the infrared absorption spectrum, the relationship between the optical bandgap E_ (x) and x, the ESCA and ESR measurements Wells conducted a preliminary discussion of these experimental results.