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单晶炉 crystal growing furnace 以高温熔化方法由原材料制备或提纯单质或化合物半导体单晶锭的设备。 直拉单晶炉 Czochralski crystal puller 在适当的温度和工作气氛控制下,将特制的硅单晶籽晶与熔化于坩埚内的高纯多晶硅材料相接触,并在籽晶与坩埚的相对旋转中按一定速度垂直向上提拉籽晶,使硅熔体不断沿籽晶晶体取向结晶,直接拉制成单晶硅锭的设备。
Equipment for the preparation or purification of simple substance or compound semiconductor single crystal ingot from raw materials by high temperature melting method. Czochralski crystal puller Czochralski crystal puller under the control of the appropriate temperature and working atmosphere, the special silicon single crystal seed and melted in the crucible of high-purity polysilicon material in contact and the relative rotation of the seed crystal and the crucible press A certain speed vertical pull up the seed crystal, the silicon melt crystal orientation along the crystalline orientation of the crystal, directly pulled into monocrystalline silicon ingot equipment.