论文部分内容阅读
提出用两组透镜阵列与非球面透镜组成焦斑可调的均匀辐照光学系统,可实现靶面光斑尺寸在几微米到几毫米的范围内连续可调,并且能将圆形入射激光束变换为方形均匀焦斑,同时满足二维激光光束形状的改变和强度空间分布均匀化的要求。应用矩阵光学、衍射积分理论,详细分析了它的工作原理,给出了系统优化设计参数和详细的数值计算结果。模拟计算结果表明,当靶面离焦量为Δz=2 mm时,x,y方向平顶区的不均匀度分别为η_x =4．6％,η_y=5．3％,能量利用率达到95．3％,基本上达到了设计要求。Zemax光学设计软件的仿真实验测试结果与理论分析结果吻合得很好。
The uniform irradiation optics system with adjustable focal spot is proposed by using two lens arrays and aspherical lenses. The spot size of the target can be continuously adjusted in the range of several micrometers to several millimeters, and the round incident laser beam can be transformed For the uniform square of the square, while meeting the two-dimensional laser beam shape changes and the strength of the spatial distribution of uniform requirements. Using matrix optics and diffraction integral theory, the working principle of the system is analyzed in detail. The optimal design parameters and the numerical results are given. The simulation results show that when the target defocusing amount is Δz = 2 mm, the non-uniformities in the flattened area in the x and y directions are η_x = 4.6% and η_y = 5.3% respectively, and the energy utilization rate reaches 95 .3%, basically reached the design requirements. The simulation experiment of Zemax optical design software is in good agreement with the theoretical analysis.