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为了增加压电陶瓷驱动快速反射镜的偏摆范围,对菱形微位移放大机构进行了研究设计。首先介绍了菱形结构的放大原理并利用变形能法分析了影响菱形结构性能的关键参数,然后建立了快速反射镜系统要求与菱形结构设计要求之间的联系,并根据自行设计的快速反射镜系统选择了菱形结构的关键参数,最后通过有限元仿真对菱形结构和快速反射镜系统进行了模态分析并对快速反射镜的偏摆范围进行了实验测试。仿真与实验结果表明,快速反射镜的偏摆范围大于6′,低阶谐振频率约为400 Hz,满足了快速反射镜的系统要求。文中研究得出,菱形结构的位移放大倍率与最大驱动力是此消彼长的两个性能,可以通过合理调整菱形长轴与菱形边夹角以及菱形边宽度使两个性能同时满足系统设计要求。
In order to increase the deflection range of the piezoelectric mirror driven fast mirror, the research and design of the diamond-shaped micro-displacement amplification mechanism was carried out. Firstly, the principle of rhombic structure amplification is introduced and the key parameters influencing the performance of rhombus structure are analyzed by using the deformation energy method. Then, the relationship between the requirement of the rhombic structure and the design requirement of the rhombus structure is established. According to the self-designed rapid mirror system The key parameters of the diamond structure are selected. Finally, the modal analysis of the diamond structure and the fast mirror system is carried out by the finite element simulation, and the deflection range of the fast mirror is experimentally tested. Simulation and experimental results show that the deflection range of the flyback mirror is greater than 6 ’and the low-order resonance frequency is about 400 Hz, which meets the system requirements of the fly-back mirror. It is concluded from the study that the displacement magnification and the maximum driving force of the diamond structure are two properties that are extroverted. By adjusting the angle between the rhombus long axis and the rhombus and the width of the rhombus, the two performances can satisfy the system design requirements .