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提出并讨论了采用 X射线色散谱 ( EDX)技术表征纳米多层膜调制结构的原理和方法 ,对Ti N/ Nb N纳米多层膜的调制结构特征进行了表征 ,并与横截面透射电子显微镜 ( TEM)表征方法进行比较 .结果表明 ,对于多层膜的调制比 ,EDX是一种更为精确和方便的方法 .采用 EDX结合 X射线衍射 ( XRD)技术可以准确、方便地表征纳米多层膜的调制结构 .
The principle and method of characterizing the modulation structure of nanometer multilayers by X-ray dispersive spectroscopy (EDX) were proposed and discussed. The modulation structures of TiN / NbN nanowire multilayer films were characterized and characterized with cross-section transmission electron microscopy (TEM) characterization.The results show that EDX is a more accurate and convenient method for the modulation ratio of multilayer films.The EDX combined with X-ray diffraction (XRD) technique can accurately and conveniently characterize the nano-multilayer Membrane modulation structure.