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本文研究了S/D=0.2～1.0(间隔O.1),其中D=1/2(D_1+D_2);D_1/D_2=5,10,20;Yr/(NI)～2=0.004～0.024(间隔0.002)的非对称磁透镜。得到了轴上磁场的相对分布,轴上磁场强度的最大值及最大值的位置。描绘了非对称磁透镜中典型的旁轴电子轨迹。计算了完整的高斯光学参量及最重要的象差系数——球差系数和色差系数。讨论了物方特性和象方特性的差异。这些结果为扫描电子显微镜和电子探针系统的设计提供了数据资料。
In this paper, S / D = 0.2 ~ 1.0 (interval O.1) was studied, in which D = 1/2 D_1 + D_2 = 5,10,20 and Yr / (NI) 2 = 0.004 ~ 0.024 (0.002 interval) asymmetric magnetic lens. The relative distribution of the magnetic field on the shaft, the maximum value of the magnetic field strength on the shaft, and the position of the maximum value are obtained. A typical paraxial electron trajectory is depicted in an asymmetric magnetic lens. The complete Gaussian optical parameters and the most important aberration coefficients - the spherical aberration coefficient and the color difference coefficient are calculated. Discusses the difference between object and image features. These results provide data for the design of scanning electron microscopy and electron probe systems.