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本文提出利用金属氧化物半导体材料制备光波导气敏元件,检测挥发性有机物蒸汽的新方法。通过溶胶凝胶法制备了In2O3粉末并用X-衍射对样品进行表征。采用提拉法在锡掺杂玻璃光波导表面制备In2O3薄膜,研制了In2O3薄膜/锡掺杂玻璃光波导传感元件,并对挥发性有机蒸汽进行检测。实验结果表明该元件对二甲苯具有较好的气敏性,在常温下该敏感元件对于浓度为1×10-6(体积分数)的二甲苯蒸汽有比较明显响应。
In this paper, a new method of preparing optical waveguide gas sensors and detection of volatile organic compounds vapor using metal oxide semiconductor materials is proposed. In2O3 powders were prepared by sol-gel method and characterized by X-ray diffraction. The In2O3 thin film was prepared on the surface of tin-doped glass optical waveguide by Czochralski method. The In2O3 thin film / tin doped glass optical waveguide sensor was fabricated and the volatile organic vapor was detected. The experimental results show that the element has better gas sensitivity to xylene, and the sensor responds more clearly to xylene vapor with the concentration of 1 × 10-6 (volume fraction) at room temperature.