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采用磁控溅射和退火法在Si(111)衬底上制备Au/SiO2纳米复合薄膜,并在两种实验模式下进行退火处理。模式A:不同的退火温度,退火20min;模式B:退火温度1 000℃,不同的退火时间。用扫描电子显微镜(SEM)、X射线衍射方法(XRD)和光致发光(PL)等测试手段对退火后的Au/SiO2纳米复合薄膜的表面形貌、微观结构和发光特性进行了分析。SEM结果表明,在模式A情况下,随着温度的增加,Au纳米颗粒的大小先增加后减小,这与XRD测试结果相吻合。PL结果表明,在模式B情况下,随着退火时间的增加,发光峰强度先增加后减小。在325nm波长下激发,440nm的发光峰与Au颗粒的大小和数量有关,而523nm的发光峰与纳米复合膜的结构有关,这与SEM平面图相吻合。实验结果表明,Au/SiO2纳米复合薄膜的表面形貌、微观结构和发光特性与退火温度及退火时间有很强的依赖关系。
Au / SiO2 nanocomposite films were prepared on Si (111) substrates by magnetron sputtering and annealing, and were annealed in two experimental modes. Mode A: different annealing temperature, annealing 20min; mode B: annealing temperature 1000 ℃, different annealing time. The surface morphology, microstructure and luminescent properties of annealed Au / SiO2 nanocomposite films were analyzed by scanning electron microscopy (SEM), X-ray diffraction (XRD) and photoluminescence (PL) SEM results show that with the increase of temperature, the size of Au nanoparticles increases and then decreases with the increase of temperature, which agrees well with the XRD results. PL results show that in the case of mode B, with the annealing time increases, the peak intensity of light first increases and then decreases. Excitation at a wavelength of 325 nm, the emission peak at 440 nm is related to the size and number of Au particles, while the emission peak at 523 nm is related to the structure of the nanocomposite film, which is consistent with the SEM plan view. The experimental results show that the surface morphology, microstructure and luminescent properties of Au / SiO2 nanocomposite films have a strong dependence on annealing temperature and annealing time.