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采用中频磁控溅射技术,以W、Al复合靶(面积比为1∶1)为靶材,在氩气和甲烷混合气体中于n(100)型单晶硅表面沉积了一系列Al、W共掺杂含氢非晶碳[a-C∶H(Al,W)]薄膜.分析了不同甲烷流量对薄膜成分、结构和表面形貌的影响,并表征了薄膜的力学性能和摩擦磨损行为.结果表明:随着甲烷流量的增加,薄膜中C含量呈上升趋势,而W和Al含量均呈现递减趋势,过高流量的CH4会导致金属靶材中毒.薄膜中的sp2C和sp3C含量受W、Al以及H注入效应的共同影响.所制备的薄膜表面均较为平滑,表面粗糙度(RMS)在0.39~0.48 nm范围内.薄膜的纳米硬度(H)在9.98~11.37 GPa之间,弹性模量(E)介于71~93.36 GPa之间,弹性恢复系数均在70%以上.当薄膜中W和Al的原子百分含量分别为3.74%和2.37%时,H/E值和H3/E2值分别为0.141和0.198,且此时薄膜在大气环境下表现出较好的减摩抗磨性能.薄膜具有适度的sp3C/sp2C比值、优异的弹性形变性能、摩擦过程中对偶球表面形成连续而致密的转移层等因素是薄膜具有良好摩擦学性能的重要原因.
A series of Al was deposited on the surface of n (100) type single crystal silicon by the medium frequency magnetron sputtering in the atmosphere of mixed gas of argon and methane with W and Al composite target (area ratio of 1: 1) W co-doped hydrogen-containing amorphous carbon [aC:H (Al, W)] thin films were prepared.The effects of different methane flow rates on the composition, structure and surface morphology of the films were analyzed and the mechanical properties and tribological behavior of the films were characterized. The results show that with the increase of methane flow, the content of C in the film is on the rise, while the content of W and Al in the film shows a decreasing trend, while the excessive flow of CH4 leads to the poisoning of the metal target.The content of sp2C and sp3C in the film is affected by W, Al and H. The surface of the films prepared is relatively smooth and the surface roughness (RMS) is in the range of 0.39 ~ 0.48 nm.The nano-hardness (H) of the films is between 9.98 and 11.37 GPa, the elastic modulus (E) ranged from 71 to 93.36 GPa and the elastic recovery coefficients were above 70% .When the atomic percentages of W and Al in the film were 3.74% and 2.37%, respectively, the values of H / E and H3 / E2 Respectively 0.141 and 0.198, and at this time the film showed good anti-friction and anti-wear properties under the atmospheric environment.The film has a moderate sp3C / sp2C ratio, excellent Plastic deformation properties, the friction during the formation of a continuous and dense spherical surface coupling factors are important reasons transfer layer film having good tribological properties.