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CdZnS film samples are prepared by a spray pyrolysis technique using aqueous solutions of CdCl, ZnCl, SC(NH) and deionized water, which are atomized using compressed air as the carrier gas onto glass substrates with different water (HO) concentrations.HO is used as the activator.The prepared films are characterized by means of XRD and UV- VIS spectroscopy.Experimental results reveal that the structures and properties of the films are greatly affected by the HO content.Water in a certain range of concentrations promotes the formation of the CdZnS films and improves the properties of the films.