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本文介绍一个由计算机控制的椭偏仪系统。详细阐述系统的硬件结构和软件库以及几个重要的子程序算法。最后举例说明该系统在测量氧化物薄膜电光效应方面的应用。
This article describes a computer-controlled ellipsometer system. Detailed description of the system’s hardware architecture and software libraries and several important subroutine algorithms. Finally, an example is given to illustrate the system’s application in measuring the electro-optic effect of oxide films.