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本文研究了在1:1光学扫描式光刻机中影响套准精度的一些因素。评价了部分此类设备的综合套准精度。通过采用基于光学原理的精细图形技术或是基于电气原理的自动测量枝术,收集了大量的有关数据。
This article studies some of the factors that affect register accuracy in a 1: 1 optical scanning lithography machine. Evaluated the comprehensive registration accuracy of some of these devices. Through the use of fine-grained graphics technology based on optical principles or based on the principle of electrical measurement of automatic measurement, a large amount of data collected.