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本文给出了具有四个圆形柔性铰链的平行弹性平台的研究结果,并运用材料力学和有限元分析进行了理论仿真,利用线切割加工工艺制造了几个整体式的平台。颈缩截面的厚度为20—100um。对这些结构的刚度进行了精密测量并与理论值进行了比较。这使得能够定性的分析在电加工中产生的在微米级范围内不能忽略的粗糙度和其它表面变形的影响。通过这些实验得到的结果对其它具有几个自由度的复杂柔性机构非常有用。
In this paper, the research results of a parallel elastic platform with four circular flexible hinges are given, and the theoretical simulation is carried out by using material mechanics and finite element analysis. Several monolithic platforms are manufactured by using the wire cutting process. The thickness of the necked section is 20-100um. The stiffness of these structures was accurately measured and compared with the theoretical values. This enables a qualitative analysis of the effects of roughness and other surface deformations that can not be ignored in the micrometer range that occur during electrical processing. The results obtained by these experiments are very useful for other complex flexible mechanisms with several degrees of freedom.